Search results for " RF magnetron sputtering"

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Optimization of ZnO:Al/Ag/ZnO:Al structures for ultra-thin high-performance transparent conductive electrodes

2012

Al-doped ZnO (AZO)/Ag/AZO multilayer coatings (50-70 nm thick) were grown at room temperature on glass substrates with different silver layer thickness, from 3 to 19 nm, by using radio frequency magnetron sputtering. Thermal stability of the compositional, optical and electrical properties of the AZO/Ag/AZO structures were investigated up to 400 °C and as a function of Ag film thickness. An AZO film as thin as 20 nm is an excellent barrier to Ag diffusion. The inclusion of 9.5 nm thin silver layer within the transparent conductive oxide (TCO) material leads to a maximum enhancement of the electro-optical characteristics. The excellent measured properties of low resistance, high transmittanc…

High transmittanceDiffusionrf-Magnetron sputteringElectro-optical characteristicGlass substrateTransparent conductive oxide RF magnetron sputtering Optical properties Electrical resistivity Al-doped zinc oxide Silver MultilayersSettore ING-INF/01 - ElettronicaSUBSTRATE-TEMPERATUREAg diffusionAl-doped ZnOLow resistanceMultilayerZNOMaterials ChemistryVisible spectral rangeMULTILAYER FILMSAl-doped zinc oxideOptical propertiesMetals and AlloysAZO filmElectrical resistivityOPTICAL-PROPERTIESOXIDE-FILMSSurfaces and InterfacesZinc oxide AluminumRadio frequency magnetron sputteringSurfaces Coatings and FilmsElectronic Optical and Magnetic MaterialsOptical and electrical propertieElectrodeOptoelectronicsFilm preparationLayer (electronics)Magnetron sputteringUltra-thinRF magnetron sputteringMaterials scienceSilverThermodynamic stabilityOpticsTransparent conductive oxideElectrical resistivity and conductivityThermal stabilityElectrical conductorTransparent conducting filmRoom temperatureThin film solar cellbusiness.industryTransparent conductiveOptical propertieSilver layerHigh transmittanceMultilayersMulti-layer-coatingZnO Electric conductivityMeasured propertiebusinessSubstrate
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